Single ion implantation for solid state quantum computer development
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چکیده
منابع مشابه
Single Ion Implantation for Solid State Quantum Computer Development
Several solid state quantum computer schemes are based on the manipulation of electron and nuclear spins of single donor atoms in a solid matrix. The fabrication of qubit arrays requires the placement of individual atoms with nanometer precision and high efficiency. In this article we describe first results from low dose, low energy implantations and our development of a low energy (<10 keV), s...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
سال: 2002
ISSN: 0734-211X
DOI: 10.1116/1.1518016